Used semiconductor equipment refers to mature, pre-owned tools previously deployed in fabrication facilities, test labs, or R&D centers. These machines span a broad range of functionsfrom wafer fabrication (front-end) to assembly, packaging, and metrology. Due to the rapid evolution of the industry, many buyers seek reliable, well-maintained equipment at a fraction of the cost of new units. The key is to assess remaining useful life, compatibility with your processes, and total ownership costs (TOC).
Categories of used equipment
Front-end wafer processing
o Lithography systems (photoresist coating/developer tools, aligners, steppers, and exposure systems)
o etchers and reactors (RIE, ICP, wet benches)
o CVD/ALD deposition tools
o PVD/sputtering systems
o Ion implantation and diffusion
o CMP (chemical-mechanical polishing) and planarization tools
Diffusion and diffusion-to-etch
o Oxidation furnaces, diffusion furnaces, annealing systems
Metrology and inspection
o Surface profilometers, ellipsometers, SEMs (scanning electron microscopes), AFMs, optical comparators
o Thin-film measurement tools, particle counters, resistivity meters
Packaging and assembly
o Wire bonders, ball bonders, die attach systems
o Molding, encapsulation, and testing equipment
Test and QA
o Automatic test equipment (ATE), wafer probing stations, burn-in stations
o Electrical test fixtures and data acquisition systems
Cleanroom and ancillary equipment
o Laminar flow benches, scrubbers, isolators
o Vacuum pumps, gas cabinets, gas analyzers
o Cryogenic systems and temperature-controlled stages
Where to find used equipment
Industry marketplaces and brokers: specialized brokers list turnkey fabs, decommissioned tools, and complete lines.
Auction houses and liquidators: occasional government or corporate asset auctions offer semiconductor tools.
Factory resales: Fab closures or capacity expansions often create opportunities to acquire equipment in stages.
Refurbished and remanufactured suppliers: many vendors offer refurbished units with warranties and service plans.
Trade-ins from fabs upgrading to newer generations.
Key evaluation criteria
Tool lineage and calibration history: request instrument serial numbers, maintenance logs, last calibration date, and any major repairs.
Condition and uptime: inspect for wear on mechanical stages, seals, vacuum integrity, and any signs of corrosion or contamination.
Serviceability and spare parts availability: determine if OEM or third-party service is still active; check access to consumables, spares, and firmware updates.
Throughput and performance: verify whether the tool’s specifications meet your process window; consider current and projected throughput.
Footprint and utilities: confirm power, cooling, vacuum, gas requirements, and layout constraints for your cleanroom.
Remote diagnostics and software: ensure compatibility with your IT environment; confirm software licenses, cybersecurity updates, and operating system dependencies.
Safety and compliance: verify compliance with safety standards and availability of necessary certifications.
Total cost of ownership: include installation, installation downtime, relocation, training, spare parts, and ongoing maintenance.
Due diligence checklist
Site visit or professional inspection: if possible, run a functional test or observe a recent run to gauge performance.
Documentation packet: operation manuals, maintenance logs, calibration certificates, and warranty or service contracts.
Return policy and warranty: negotiate short-term warranties or service-level agreements (SLAs) for used purchases.
Relocation considerations: budget for deinstallation, shipping, crating, and reinstallation; assess risk of damage.
Compatibility and upgrade paths: check whether control software and firmware can be updated or integrated with existing systems.
Risk assessment: analyze the risk of latent defects, lead times for spares, and potential downtime during replacement or migration.